APPARATUS AND METHOD FOR IMPROVING ETCH RATE UNIFORMITY

Details for Australian Patent Application No. 2002343707 (hide)

Owner LAM RESEARCH

Inventors DHINSA, Rajinder; KADKHODAYAN, Bobby

Pub. Number AU-A-2002343707

PCT Number PCT/US02/36557

PCT Pub. Number WO2003/043061

Priority 60/338,034 13.11.01 US

Filing date 13 November 2002

Wipo publication date 26 May 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 60/338,034 13.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002343707

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002343708-COLLABORATION AND INNOVATION SYSTEM

2002343706-NON-SLIP ABSORBENT ARTICLE