THERMAL MANAGEMENT WITH FILLED POLYMERIC POLISHING PADS AND APPLICATIONS THEREFOR

Details for Australian Patent Application No. 2002343600 (hide)

Owner OBENG, Yaw, S. YOKLEY, Edward, M. PSILOQUEST INC.

Inventors OBENG, Yaw, S.; YOKLEY, Edward, M.

Pub. Number AU-A-2002343600

PCT Number PCT/US02/35000

PCT Pub. Number WO2003/078535

Priority 10/090,397 04.03.02 US

Filing date 31 October 2002

Wipo publication date 29 September 2003

International Classifications

C09G 001/02 Polishing compositions

B24D 003/34 Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature - characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24D 003/28 Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/090,397 04.03.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2002343600

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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