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Details for Australian Patent Application No. 2002343598 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors MIN, Byoung, W.

Pub. Number AU-A-2002343598

PCT Number PCT/US02/34959

PCT Pub. Number WO2003/044853

Priority 10/002,054 15.11.01 US

Filing date 30 October 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/74 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/002,054 15.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002343598

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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