STIFFENED SURFACE MICROMACHINED STRUCTURES AND PROCESS FOR FABRICATING THE SAME

Details for Australian Patent Application No. 2002343537 (hide)

Owner MONTANA STATE UNIVERSITY-BOZEMAN

Inventors DICKENSHEETS, David, L.; KAISER, Todd, J.; HIMMER, Philip, A.; LUTZENBERGER, Jeffrey; FRIHOLM, Robert, A.

Pub. Number AU-A-2002343537

PCT Number PCT/US02/33351

PCT Pub. Number WO2003/036737

Priority 60/330,433 22.10.01 US

Filing date 21 October 2002

Wipo publication date 6 May 2003

International Classifications

H01L 049/00 Solid state devices not provided for in groups and and not provided for in any other subclass

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 60/330,433 22.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002343537

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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