FORMING LOW K DIELECTRIC LAYERS

Details for Australian Patent Application No. 2002343029 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors MACNEIL, John; ISHAQ, Sajid; GRIS, Herve; GILES, Katherine

Pub. Number AU-A-2002343029

PCT Number PCT/GB02/05173

PCT Pub. Number WO2003/044843

Priority 0127474.5 16.11.01 GB; 60/391,970 28.06.02 US

Filing date 15 November 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 0127474.5 16.11.01 GB; 60/391,970 28.06.02 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002343029

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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