OPTICAL SYSTEM WITH BIREFRINGENT OPTICAL ELEMENTS

Details for Australian Patent Application No. 2002342890 (hide)

Owner CARL ZEISS SMT AG

Inventors FIOLKA, Damian; DITTMAN, Olaf; TOTZECK, Michael; DIECKMANN, Nils; KOHLER, Jess; GRUNER, Toralf; KRAHMER, Daniel

Pub. Number AU-A-2002342890

PCT Number PCT/EP02/12446

PCT Pub. Number WO2003/077011

Priority 102 11 762.4 14.03.02 DE

Filing date 7 November 2002

Wipo publication date 22 September 2003

International Classifications

G02B 027/28 Other optical systems - for polarising

G02B 005/30 Optical elements other than lenses - Polarising elements

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 102 11 762.4 14.03.02 DE

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2002342890

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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