METHOD AND DEVICE FOR DEPOSITING A PLURALITY OF LAYERS ON A SUBSTRATE

Details for Australian Patent Application No. 2002342663 (hide)

Owner AIXTRON AG

Inventors SCHUMACHER, Markus

Pub. Number AU-A-2002342663

PCT Number PCT/EP02/10051

PCT Pub. Number WO2003/031677

Priority 101 50 776.3 08.10.01 DE; 102 06 984.0 20.02.02 DE

Filing date 7 September 2002

Wipo publication date 22 April 2003

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 101 50 776.3 08.10.01 DE; 102 06 984.0 20.02.02 DE

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002342663

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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