WAFER PEDESTAL TILT MECHANISM AND COOLING SYSTEM

Details for Australian Patent Application No. 2002342157 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors WEED, Alan; FISH, Roger

Pub. Number AU-A-2002342157

PCT Number PCT/US02/34382

PCT Pub. Number WO2003/036679

Priority 10/054,325 25.10.01 US

Filing date 25 October 2002

Wipo publication date 6 May 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/054,325 25.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002342157

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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