METHOD AND SYSTEM FOR MONITORING A SEMICONDUCTOR WAFER PLASMA ETCH PROCESS

Details for Australian Patent Application No. 2002341995 (hide)

Owner MOTOROLA INC.

Inventors PETRUCCI, Joseph,; MALTABES, John,; MAUTZ, Karl

Pub. Number AU-A-2002341995

PCT Number PCT/US02/31919

PCT Pub. Number WO2003/038872

Priority 10/033,107 26.10.01 US

Filing date 3 October 2002

Wipo publication date 12 May 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/033,107 26.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002341995

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  Application withdrawn under section 141(3)/See Reg. 8.3(2). Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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