ETCH-STOP RESINS

Details for Australian Patent Application No. 2002341986 (hide)

Owner DOW CORNING CORPORATION

Inventors BOISVERT, Ronald; GRIGORAS, Stelian; HA, David; HARKNESS, Brian; YEAKLE, Craig

Pub. Number AU-A-2002341986

PCT Number PCT/US02/31824

PCT Pub. Number WO2003/035720

Priority 10/066,261 22.10.01 US

Filing date 4 October 2002

Wipo publication date 6 May 2003

International Classifications

C08G 077/12 Macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon

C09D 183/04 Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only - Polysiloxanes

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/066,261 22.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002341986

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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