APPARATUS FOR INVERTED CVD

Details for Australian Patent Application No. 2002341885 (hide)

Owner CREE LIGHTING COMPANY

Inventors DENBAARS, Steven; NAKAMURA, Shuji; COULTER, Mike; BATRES, Max

Pub. Number AU-A-2002341885

PCT Number PCT/US02/30960

PCT Pub. Number WO2003/029516

Priority 60/325,637 29.09.01 US

Filing date 27 September 2002

Wipo publication date 14 April 2003

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 60/325,637 29.09.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002341885

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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