PLASMA REACTOR COIL MAGNET SYSTEM

Details for Australian Patent Application No. 2002341591 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MITROVIC, Andrej, S.

Pub. Number AU-A-2002341591

PCT Number PCT/US02/27978

PCT Pub. Number WO2003/025971

Priority 60/318,890 14.09.01 US

Filing date 4 September 2002

Wipo publication date 1 April 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 60/318,890 14.09.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002341591

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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