METHOD AND SYSTEM FOR THIN FILM CHARACTERIZATION

Details for Australian Patent Application No. 2002341363 (hide)

Owner NOVA MEASURING INSTRUMENTS LTD.

Inventors FINAROV, Moshe

Pub. Number AU-A-2002341363

PCT Number PCT/IL02/00798

PCT Pub. Number WO2003/030250

Priority 145699 30.09.01 IL

Filing date 30 September 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G01N 021/17 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Systems in which incident light is modified in accordance with the properties of the material investigated

G01N 021/84 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Systems specially adapted for particular applications

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 145699 30.09.01 IL

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002341363

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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