COMBINED ETCHING AND DOPING SUBSTANCES

Details for Australian Patent Application No. 2002340900 (hide)

Owner MERCK PATENT GMBH

Inventors KLEIN, Sylke; KUBELBECK, Armin; STOCKUM, Werner; SCHMIDT, Wilfried; SCHUM, Berthold

Pub. Number AU-A-2002340900

PCT Number PCT/EP02/10264

PCT Pub. Number WO2003/034504

Priority 101 50 040.8 10.10.01 DE

Filing date 13 September 2002

Wipo publication date 28 April 2003

International Classifications

H01L 031/0216 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Coatings

H01L 031/18 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09K 013/04 Etching, surface-brightening or pickling compositions

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 101 50 040.8 10.10.01 DE

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002340900

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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