BELOW 160NM OPTICAL LITHOGRAPHY CRYSTAL MATERIALS AND METHODS OF MAKING

Details for Australian Patent Application No. 2002340462 (hide)

Owner CORNING INCORPORATED

Inventors SPARROW, Robert, W

Pub. Number AU-A-2002340462

PCT Number PCT/US02/36116

PCT Pub. Number WO2003/043944

Priority 09/991,315 20.11.01 US

Filing date 12 November 2002

Wipo publication date 10 June 2003

International Classifications

C03C 010/16 Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition

C03B 029/12 Reheating glass products for softening or fusing their surfaces

C03C 003/32 Glass compositions - Non-oxide glass compositions, e.g. binary or ternary halides, sulfides, or nitrides of germanium, selenium or tellurium

C03B 011/04 Pressing glass - in machines with moulds fed by suction

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 09/991,315 20.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002340462

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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