METHOD OF FORMING RELIABLE CU INTERCONNECTS

Details for Australian Patent Application No. 2002340442 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors HALLIYAL, Arvind; PATON, Eric; NGO, Minh, Van

Pub. Number AU-A-2002340442

PCT Number PCT/US02/35964

PCT Pub. Number WO2003/041162

Priority 09/986,267 08.11.01 US

Filing date 8 November 2002

Wipo publication date 19 May 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 09/986,267 08.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002340442

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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