METHOD OF IMPLANTATION AFTER COPPER SEED DEPOSITION

Details for Australian Patent Application No. 2002340177 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LOPATIN, Sergey; BESSER, Paul, R.; BUYNOSKI, Matthew, S.

Pub. Number AU-A-2002340177

PCT Number PCT/US02/32554

PCT Pub. Number WO2003/046978

Priority 09/994,358 26.11.01 US

Filing date 11 October 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 09/994,358 26.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002340177

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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