PREFERENTIAL CORNER ROUNDING OF TRENCH STRUCTURES USING POST-FILL OXIDATION

Details for Australian Patent Application No. 2002339920 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors HAINES, Jeffrey, C.

Pub. Number AU-A-2002339920

PCT Number PCT/US02/28983

PCT Pub. Number WO2003/043078

Priority 10/008,544 13.11.01 US

Filing date 12 September 2002

Wipo publication date 26 May 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 10/008,544 13.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002339920

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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