A METHOD AND APPARATUS FOR INLINE MEASUREMENT OF MATERIAL REMOVAL DURING A POLISHING OR GRINDING PROCESS

Details for Australian Patent Application No. 2002339410 (hide)

Owner STRUERS A/S

Inventors HANSEN, Jesper, Romer

Pub. Number AU-A-2002339410

PCT Number PCT/DK02/00610

PCT Pub. Number WO2003/026847

Priority PA 2001 01391 24.09.01 DK

Filing date 20 September 2002

Wipo publication date 7 April 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/12 Measuring - involving optical means

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): PA 2001 01391 24.09.01 DK

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002339410

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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