MULTI-CHAMBER INSTALLATION FOR TREATING OBJECTS UNDER VACUUM, METHOD FOR EVACUATING SAID INSTALLATION AND EVACUATION SYSTEM THEREFOR

Details for Australian Patent Application No. 2002338828 (hide)

Owner LEYBOLD VAKUUM GMBH

Inventors MULLER, Peter; ARNDT, Lutz

Pub. Number AU-A-2002338828

PCT Number PCT/EP02/10918

PCT Pub. Number WO2003/033761

Priority 101 50 015.7 11.10.01 DE

Filing date 28 September 2002

Wipo publication date 28 April 2003

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C23C 014/22 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

F04C 023/00 Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 101 50 015.7 11.10.01 DE

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002338828

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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