METHOD AND DEVICE FOR PRODUCING A PLASMA

Details for Australian Patent Application No. 2002338801 (hide)

Owner UNAXIS BALZERS AKTIENGESELLSCHAFT

Inventors WEICHART, Jurgen; AMMAN, Dominik, Wimo; KRASSNITZER, Siegfried

Pub. Number AU-A-2002338801

PCT Number PCT/EP02/10811

PCT Pub. Number WO2003/030207

Priority 101 47 998.0 28.09.01 DE

Filing date 26 September 2002

Wipo publication date 14 April 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 101 47 998.0 28.09.01 DE

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002338801

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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