DETECTOR OPTICS FOR ELECTRON BEAM INSPECTION SYSTEM

Details for Australian Patent Application No. 2002338468 (hide)

Owner MULTIBEAM SYSTEMS, INC.

Inventors PARKER, Norman, William; YIN, Edward, M.; TSAI, Frank, Ching-Feng

Pub. Number AU-A-2002338468

PCT Number PCT/US02/12473

PCT Pub. Number WO2002/086941

Priority 60/338,579 18.04.01 US

Filing date 18 April 2002

Wipo publication date 5 November 2002

International Classifications

H01J 037/244 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Detectors

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 60/338,579 18.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002338468

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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