ANGULAR SPIN, RINSE, AND DRY MODULE AND METHODS FOR MAKING AND IMPLEMENTING THE SAME

Details for Australian Patent Application No. 2002338262 (hide)

Owner LAM RESEARCH CORPORATION

Inventors TREUR, Randolph, E.

Pub. Number AU-A-2002338262

PCT Number PCT/US02/09868

PCT Pub. Number WO2002/080237

Priority 09/823,813 30.03.01 US

Filing date 27 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 09/823,813 30.03.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002338262

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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