METHOD OF ETCHING HIGH ASPECT RATIO FEATURES

Details for Australian Patent Application No. 2002337812 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HYLAND, Sandra; KAJIMOTO, Minori; MOSDEN, Aelan

Pub. Number AU-A-2002337812

PCT Number PCT/US02/31607

PCT Pub. Number WO2003/037497

Priority 60/330,788 31.10.01 US

Filing date 31 October 2002

Wipo publication date 12 May 2003

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 60/330,788 31.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002337812

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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