RAPID CYCLE CHAMBER HAVING A TOP VENT WITH NITROGEN PURGE

Details for Australian Patent Application No. 2002337659 (hide)

Owner LAM RESEARCH CORPORATION

Inventors JACOB, David, E.; HALSEY, Harlan, I.

Pub. Number AU-A-2002337659

PCT Number PCT/US02/24287

PCT Pub. Number WO2003/014411

Priority 10/113,014 28.03.02 US; 60/311,065 08.08.01 US

Filing date 30 July 2002

Wipo publication date 24 February 2003

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 10/113,014 28.03.02 US; 60/311,065 08.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002337659

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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