IMPROVED PRECURSORS FOR CHEMICAL VAPOUR DEPOSITION

Details for Australian Patent Application No. 2002337310 (hide)

Owner EPICHEM LIMITED

Inventors JONES, Anthony, Copeland

Pub. Number AU-A-2002337310

PCT Number PCT/GB02/04822

PCT Pub. Number WO2003/035926

Priority 0125724.5 26.10.01 GB; 0129080.8 04.12.01 GB

Filing date 25 October 2002

Wipo publication date 6 May 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 0125724.5 26.10.01 GB; 0129080.8 04.12.01 GB

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002337310

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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