DEVICE FOR COATING SUBSTRATES WITH A CURVED SURFACE BY PULSED MAGNETRON SPUTTERING

Details for Australian Patent Application No. 2002337056 (hide)

Owner FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E. V.

Inventors GOEDICKE, Klaus; KIRCHHOFF, Volker; LIEBIG, Jorn-Steffen

Pub. Number AU-A-2002337056

PCT Number PCT/EP02/09797

PCT Pub. Number WO2003/023813

Priority 10145201.2 13.09.01 DE

Filing date 3 September 2002

Wipo publication date 24 March 2003

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 10145201.2 13.09.01 DE

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002337056

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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