SINGLE MOTOR, MULTI-AXIS STAGE

Details for Australian Patent Application No. 2002336715 (hide)

Owner ADVANTEST AMERICA CORPORATION ADVANTEST CORP.

Inventors ROY, Shambhu, N.

Pub. Number AU-A-2002336715

PCT Number PCT/US02/35216

PCT Pub. Number WO2003/039808

Priority 10/277,828 23.10.02 US; 60/330,931 02.11.01 US

Filing date 4 November 2002

Wipo publication date 19 May 2003

International Classifications

B23Q 001/48 Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members

B23Q 005/38 Driving or feeding mechanisms

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B23Q 005/34 Driving or feeding mechanisms

B23Q 001/62 Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 10/277,828 23.10.02 US; 60/330,931 02.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002336715

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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