SPIN-ON-GLASS ANTI-REFLECTIVE COATINGS FOR PHOTOLITHOGRAPHY

Details for Australian Patent Application No. 2002336709 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors HACKER, Nigel; KENNEDY, Joseph; SPEAR, Richard; BALDWIN, Teresa

Pub. Number AU-A-2002336709

PCT Number PCT/US02/35101

PCT Pub. Number WO2003/044079

Priority 10/001,143 15.11.01 US

Filing date 31 October 2002

Wipo publication date 10 June 2003

International Classifications

C08G 077/12 Macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon

C08G 077/18 Macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon

C07F 007/18 Compounds containing elements of the 4th Group of the Periodic System

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 10/001,143 15.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002336709

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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