MEASUREMENT OF COMPLEX SURFACE SHAPES USING A SPHERICAL WAVEFRONT

Details for Australian Patent Application No. 2002336534 (hide)

Owner ZYGO CORPORATION

Inventors COLONNA DE LEGA, Xavier; DE GROOT, Peter, J.

Pub. Number AU-A-2002336534

PCT Number PCT/US02/29254

PCT Pub. Number WO2003/033994

Priority 10/190,353 03.07.02 US; 60/329,627 16.10.01 US

Filing date 13 September 2002

Wipo publication date 28 April 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 10/190,353 03.07.02 US; 60/329,627 16.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002336534

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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