PROTECTIVE SHIELD AND SYSTEM FOR GAS DISTRIBUTION

Details for Australian Patent Application No. 2002336403 (hide)

Owner ASML US, INC.

Inventors PARK, Seung, Gyun; YUH, Soon, K.; MATTSON, Colby; HAKIMELAHY, Iraj; BARTHOLOMEW, Lawrence, D.

Pub. Number AU-A-2002336403

PCT Number PCT/US02/27376

PCT Pub. Number WO2003/018866

Priority 60/314,762 24.08.01 US

Filing date 26 August 2002

Wipo publication date 10 March 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

C23C 016/56 Chemical deposition or plating by decomposition - After-treatment

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 60/314,762 24.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002336403

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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