POLISHING COMPOUND, METHOD FOR PRODUCTION THEREOF AND POLISHING METHOD

Details for Australian Patent Application No. 2002336301 (hide)

Owner ASAHI GLASS COMPANY, LIMITED SEIMI CHEMICAL CO., LTD.

Inventors KON, Yoshinori; NAKAZAWA, Norihito; TAKEMIYA, Satoshi

Pub. Number AU-A-2002336301

PCT Number PCT/JP02/10996

PCT Pub. Number WO2003/036705

Priority 2001-353207 19.11.01 JP; 2001-329148 26.10.01 JP

Filing date 23 October 2002

Wipo publication date 6 May 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

B24B 037/00 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 2001-353207 19.11.01 JP; 2001-329148 26.10.01 JP

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002336301

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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