METHOD FOR FEEDING PURGE GAS TO EXPOSURE APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

Details for Australian Patent Application No. 2002336294 (hide)

Owner NIKON CORPORATION

Inventors OWA, Soichi; NISHIKAWA, Jin

Pub. Number AU-A-2002336294

PCT Number PCT/JP02/10985

PCT Pub. Number WO2003/036695

Priority 2001-325573 23.10.01 JP

Filing date 23 October 2002

Wipo publication date 6 May 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 2001-325573 23.10.01 JP

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002336294

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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