CHAMBER SHIELDS FOR A PLASMA CHAMBER

Details for Australian Patent Application No. 2002335687 (hide)

Owner HYUNDAI SEMICONDUCTOR AMERICA, INC.

Inventors GOOD, Brian, James

Pub. Number AU-A-2002335687

PCT Number PCT/US02/27779

PCT Pub. Number WO2003/021644

Priority 60/315,868 28.08.01 US

Filing date 28 August 2002

Wipo publication date 18 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 60/315,868 28.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002335687

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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