APPARATUS FOR MEASURING THICKNESS PROFILE AND REFRACTIVE INDEX DISTRIBUTION OF MULTIPLE LAYERS OF THIN FILMS BY MEANS OF TWO-DIMENSIONAL REFLECTOMETRY AND METHOD OF MEASURING THE SAME

Details for Australian Patent Application No. 2002335556 (hide)

International Classifications

Event Publications

13 February 2003 Complete Application Filed

Priority application(s): 2001/58535 21.09.01 KR; 2002/57581 23.09.02 KR

5 June 2003 Application Open to Public Inspection

Published as AU-A-2002335556

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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