MICROWAVE PLASMA SUBSTRATE PROCESSING DEVICE

Details for Australian Patent Application No. 2002335523 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors OZAKI, Shigenori; YUASA, Tamaki

Pub. Number AU-A-2002335523

PCT Number PCT/JP02/10798

PCT Pub. Number WO2003/036708

Priority 2001/322753 19.10.01 JP

Filing date 17 October 2002

Wipo publication date 6 May 2003

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 2001/322753 19.10.01 JP

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002335523

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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