DIAPHRAGM DEVICE, PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE DEVICE, AND MICRO-DEVICE PRODUCING METHOD

Details for Australian Patent Application No. 2002335432 (hide)

Owner NIKON CORPORATION

Inventors TAMAOKI, Kenji

Pub. Number AU-A-2002335432

PCT Number PCT/JP02/09956

PCT Pub. Number WO2003/028074

Priority 2001-294382 26.09.01 JP; 2002-108183 10.04.02 JP

Filing date 26 September 2002

Wipo publication date 7 April 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03B 009/02 Exposure-making shutters - Diaphragms

G02B 005/00 Optical elements other than lenses

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 2001-294382 26.09.01 JP; 2002-108183 10.04.02 JP

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002335432

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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