METHOD AND SYSTEM FOR DETERMINING A THICKNESS OF A LAYER

Details for Australian Patent Application No. 2002334838 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors FRISA, Larry,; MAUTZ, Karl

Pub. Number AU-A-2002334838

PCT Number PCT/US02/31680

PCT Pub. Number WO2003/038374

Priority 10/033,066 26.10.01 US

Filing date 3 October 2002

Wipo publication date 12 May 2003

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 10/033,066 26.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002334838

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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