METHOD AND APPARATUS FOR MITIGATING CROSS-CONTAMINATION BETWEEN LIQUID DISPENSING JETS IN CLOSE PROXIMITY TO A SURFACE

Details for Australian Patent Application No. 2002334796 (hide)

Owner SILICON VALLEY GROUP, INC.

Inventors NGUYEN, Andrew

Pub. Number AU-A-2002334796

PCT Number PCT/US02/31459

PCT Pub. Number WO2003/030228

Priority 60/327,055 03.10.01 US

Filing date 3 October 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05C 011/02 Component parts, details or accessories not specifically provided for in groups - Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 60/327,055 03.10.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002334796

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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