METHOD AND APPARATUS FOR SPUTTER DEPOSITION OF EPILAYERS WITH HIGH DEPOSITION RATE

Details for Australian Patent Application No. 2002334713 (hide)

Owner E.I. DU PONT DE NEMOURS AND COMPANY CHISTYAKOV, Roman

Inventors CHISTYAKOV, Roman

Pub. Number AU-A-2002334713

PCT Number PCT/US02/30866

PCT Pub. Number WO2003/027351

Priority 60/325,331 27.09.01 US

Filing date 27 September 2002

Wipo publication date 7 April 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 60/325,331 27.09.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002334713

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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