PHOSPONO COMPOUND-CONTAINING POLISHING COMPOSITION AND METHOD OF USING SAME

Details for Australian Patent Application No. 2002334642 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors FANG, Mingming

Pub. Number AU-A-2002334642

PCT Number PCT/US02/30149

PCT Pub. Number WO2003/031527

Priority 09/975,335 11.10.01 US

Filing date 20 September 2002

Wipo publication date 22 April 2003

International Classifications

C09G 001/02 Polishing compositions

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 09/975,335 11.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002334642

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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