MULTIZONE CARRIER WITH PROCESS MONITORING SYSTEM FOR CHEMICAL-MECHANICAL PLANARIZATION TOOL

Details for Australian Patent Application No. 2002334604 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors LAURSEN, Thomas; TROJAN, Daniel

Pub. Number AU-A-2002334604

PCT Number PCT/US02/29746

PCT Pub. Number WO2003/028950

Priority 09/970,185 03.10.01 US

Filing date 20 September 2002

Wipo publication date 14 April 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/10 Measuring - involving electrical means

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

B24D 007/12 Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face

B24B 049/04 Measuring

B24B 049/12 Measuring - involving optical means

B24B 049/14 Measuring

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 09/970,185 03.10.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002334604

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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