Micromechanical inertial sensor having increased pickoff resonance damping
Details for Australian Patent Application No. 2002334586 (hide)
International Classifications
Event Publications
13 February 2003 Complete Application Filed
Priority application(s): 09/957,425 20.09.01 US
5 June 2003 Application Open to Public Inspection
Published as AU-B-2002334586
16 June 2005 Application Accepted
Published as AU-B-2002334586
27 October 2005 Standard Patent Sealed
15 April 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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