METHOD FOR REDUCING SURFACE RUGOSITY

Details for Australian Patent Application No. 2002333957 (hide)

Owner S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES

Inventors NEYRET, Eric; ECARNOT, Ludovic

Pub. Number AU-A-2002333957

PCT Number PCT/FR02/02341

PCT Pub. Number WO2003/005434

Priority 0108859 04.07.01 FR

Filing date 4 July 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/324 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 0108859 04.07.01 FR

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002333957

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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