METHOD AND DEVICE FOR PRODUCING LAYER SYSTEMS FOR OPTICAL PRECISION ELEMENTS

Details for Australian Patent Application No. 2002333710 (hide)

Owner FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E. V.

Inventors GOEDICKE, Klaus; KIRCHHOFF, Volker; WINKLER, Torsten; LIEBIG, Jorn-Steffen

Pub. Number AU-A-2002333710

PCT Number PCT/EP02/09509

PCT Pub. Number WO2003/021001

Priority 101 43 145.7 03.09.01 DE

Filing date 26 August 2002

Wipo publication date 18 March 2003

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 101 43 145.7 03.09.01 DE

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002333710

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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