METHOD FOR PRODUCING MICROELECTROMECHANICAL COMPONENTS

Details for Australian Patent Application No. 2002333693 (hide)

International Classifications

Event Publications

13 February 2003 Complete Application Filed

Priority application(s): 101 41 571.0 24.08.01 DE; 101 41 558.3 24.08.01 DE; 102 22 959.7 23.05.02 DE

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

24 June 2004 Application Open to Public Inspection

Published as AU-A-2002333693

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