METHOD FOR PRODUCING THIN OXIDE OR NITRIDE LAYERS

Details for Australian Patent Application No. 2002333487 (hide)

Owner CCR GMBH BESCHICHTUNGS TECHNOLOGIE

Inventors DEMOKRITOV, Serguei, O.; ROOS, Bjorn, F., P.; WEILER, Manfred; DAHL, Roland; HILLEBRANDS, Burkard

Pub. Number AU-A-2002333487

PCT Number PCT/EP02/09323

PCT Pub. Number WO2003/020996

Priority 01121046.5 03.09.01 EP

Filing date 21 August 2002

Wipo publication date 18 March 2003

International Classifications

C23C 008/36 Solid state diffusion into metallic material surfaces

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 01121046.5 03.09.01 EP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002333487

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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