SYSTEM FOR REMOVING DEPOSITED MATERIAL FROM WITHIN A SEMICONDUCTOR FABRICATION DEVICE

Details for Australian Patent Application No. 2002332786 (hide)

Owner BRADLEY, Mitchell, D.

Inventors BRADLEY, Mitchell, D.

Pub. Number AU-A-2002332786

PCT Number PCT/US02/27833

PCT Pub. Number WO2003/020449

Priority 09/943,569 30.08.01 US

Filing date 30 August 2002

Wipo publication date 18 March 2003

International Classifications

B08B 005/04 Cleaning by methods involving the use of air flow or gas flow

B08B 009/00 Cleaning hollow articles by methods or apparatus specially adapted thereto

B08B 009/027 Cleaning hollow articles by methods or apparatus specially adapted thereto

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 09/943,569 30.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332786

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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