MICROELECTRONIC MECHANICAL SYSTEM AND METHODS

Details for Australian Patent Application No. 2002332780 (hide)

Owner SILICON LIGHT MACHINES

Inventors BRUNER, Mike

Pub. Number AU-A-2002332780

PCT Number PCT/US02/27822

PCT Pub. Number WO2003/023849

Priority 09/952,626 13.09.01 US

Filing date 29 August 2002

Wipo publication date 24 March 2003

International Classifications

H01L 023/02 Details of semiconductor or other solid state devices - Containers

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/461 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 09/952,626 13.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332780

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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