PLASMA PROCESSING APPARATUS

Details for Australian Patent Application No. 2002332333 (hide)

Owner TOKYO ELECTRON LIMITED KABUSHIKI KAISHA TOSHIBA

Inventors SAKAI, Itsuko; HIMORI, Shinji

Pub. Number AU-A-2002332333

PCT Number PCT/JP02/09999

PCT Pub. Number WO2003/030241

Priority 2001/303714 28.09.01 JP

Filing date 27 September 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 2001/303714 28.09.01 JP

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332333

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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